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學術報告:Gas cluster ion beams: production, diagnostics and optical materials treatment(團簇離子的產生、控制及團簇離子束納米制造)

來源:  發布時間:2019-11-15 10:18:38 點擊次數:

報告題目:Gas cluster ion beams: production, diagnostics and optical materials treatment(團簇離子的產生、控制及團簇離子束納米制造)

報告人:Prof. Nikolay G. KorobeishchikovNovosibirsk State University

報告時間:20191119日(周二)下午16:00-17:00

報告地點:物理學院新樓多功能廳

Abstract:

The speaker will address the science and technology of gas cluster ion beams (GCIBs). This will include production of the clusters by means of ultrasonic expansion of high-pressure gases, diagnosis of the beams and interaction of the GCIB with matter, which is essential for the application of the cluster ion beams in materials processing such as ion implantation and surface smoothing down to sub-nano scale.

本講座介紹氣體團簇離子束的科學技術問題,介紹高壓氣體超聲膨脹產生團簇粒子、團簇離子束的傳輸與控制以及團簇離子束納米制造技術,包括超淺離子注入和亞納米表面平坦化。


About speaker:

1986年畢業于新西伯利亞大學物理系,獲得碩士學位(本碩連讀)

2003年畢業于俄羅斯科學院新西伯利亞分院熱能物理研究所,獲得博士學位

2019-present, Leading Researcher, Novosibirsk State University

2012-present, Head of Laboratory of Ion Cluster Technologies, Department of Applied Physics Novosibirsk State University

2007-2018, Senior Researcher, Novosibirsk State University

1988-2002, Junior Researcher, Novosibirsk State University



邀請人:付德君 教授


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